A brief review is presented of investigations performed in 2002-2020 on ultraviolet inactivation of bacteria, vital cells, and viruses by using excilamps. The excilamp models that have been developed at the Institute of High-Current Electronics, SB RAS are briefly described. Scientific data acquired by now show that excilamps on KrCl , KrBr , and XeBr molecules are an alternative to low-pressure mercury lamps with respect to optical parameters. These sources of optical radiation exhibit a bactericidal effect, and emission of KrCl and KrBr excilamps demonstrates viricidal action. The latter is actual due to expansion of coronavirus disease. * * *